سیستم لیتوگرافی مسک الاینر رومیزی

The mask aligner following is the ideal, economical tool for laboratories and small series production. This equipment can achieve a resolution of 2 µm, a performance unsurpassed in any other comparable machine. The machine is widely used for MEMS, Microelectronics ,Microfluidics  and optoelectronics applications. Mask aligner system has a new 5-axis motorized system for moving substrate (x, y and ɵ) and digital microscope (x, y). This equipment can be ordered for laboratory and industrial applications.

 

Features

Specifications

Type

Laboratories Desktop or Industrial Stand alone

Display

5” Touch Screen

Aligning Mask

Motorized x,y, ɵ

Microscope

Digital CCD with 2-axis Motorized, Motion

Light source

Monochromatic 365nm 20,100watt

Maximum g-line intensity

7,15 mW/Cm2 in 20, 100watt UV source

Cover Material

Stainless Steel

Vacuum grasping

Mask & substrate

Warranty

1 year

Training and technical support

In Training center and free remote support