زبان
Satalab

لیتوگرافی صنعتی ایستاده با سیستم الاینر موتورایز

The mask aligner following is the ideal, economical tool for laboratories and small series production. This equipment can achieve a resolution of 2 µm, a performance unsurpassed in any other comparable machine. The machine is widely used for MEMS, Microelectronics ,Microfluidics and optoelectronics applications. Mask aligner system has a new 5-axis motorized system for moving substrate (x, y and ɵ) and digital microscope (x, y). This equipment can be ordered for laboratory and industrial applications.

 

Features

Specifications

Display

5” Touch Screen

Aligning Mask

Motorized x,y, ɵ

Microscope

Digital Microscope with 2 (Motorized) axis

Light source

Monochromatic 365 nm 20,100 watt

Maximum g-line intensity

7 or 15 mW/Cm2 in 20 or 100 watt UV source

Cover Material

Stainless steel

Vacuum grasping

Mask & substrate

Motorized stage resolution

0.2 µm

Warranty

1 year

Training and technical support

In training center and free remote support